Residual Gas Analyzers (RGAs)
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INFICON residual gas analyzers (RGAs) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases.
Transpector 2 Gas Analysis System
Superior Sensitivity for Contamination Control; this RGA provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing.
Transpector HPR Gas Analysis System
An RGA with consistent Sensitivity for Optimal Contamination Control
Transpector XPR3 Gas Analysis System
PVD Process Monitoring Without Complex Pressure Conversion; this RGA monitors physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility.
Transpector CPM Compact Process Monitor
Comprehensive Gas Analysis Made Affordable; this RGA is a full-featured, compact and economical gas analyzer that's ideally suited for in situ monitoring of complex processes.
Transpector Software
Process Characterization Software For The Transpector Gas Analysis System
Quantus LP100 Gas Analyzer
Real-time Endpoint and Contamination Detection from 10 mTorr to 1 Torr
Mobile Cart for Transpector CPM Compact Process Monitor
Self-Contained Cart for Mobile Troubleshooting
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Transpector CPM Compact Process Monitor
Economical gas analyzer ideally suited for in situ monitoring of complex processes.
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