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Residual Gas Analyzers
INFICON residual gas analyzers (RGA) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases.
PPM422 Plasma Process Monitor
The Transpector® Gas Analysis System family of instruments
Transpector® Gas Analyzers provide accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection.
Transpector 2 Gas Analysis System
Superior Sensitivity for Contamination Control; provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing.
Transpector HPR Gas Analysis System
Consistent Sensitivity for Optimal Contamination Control
Transpector XPR3 Gas Analysis System
PVD Process Monitoring Without Complex Pressure Conversion; monitors physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility.
Transpector CPM Compact Process Monitor
Comprehensive Gas Analysis Made Affordable; a full-featured, compact and economical gas analyzer that's ideally suited for in situ monitoring of complex processes.
Transpector Software
Process Characterization Software For The Transpector Gas Analysis System
IPC400 Pumping Packages
Design an Easy-To-Use Pumping Package that Extends Your Sampling Range.
Mobile Cart for Transpector CIS2 and IPC400 Systems
Self-Contained Cart for Mobile Troubleshooting
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