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PPM422 Plasma Process Monitor
The PPM422 Plasma Process Monitor is a differentially pumped mass spectrometer with an integrated energy analyzer for measuring neutral particles, positive and negative ions, as well as for energy analysis of ions and neutral particles in plasma processes.
Features at a Glance:
- Detection of neutral particles and positive and negative ions from the plasma
- Energy analysis of neutral particles and positive and negative ions
- Measurement of radicals
- Endpoint detection of plasma processes
- Large dynamic range
- High measuring speed
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