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Transpector 2 Gas Analysis System
Superior Sensitivity for Contamination Control
The Transpector® Gas Analysis System is an RGA that provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.
Features at a Glance
- 100-,200-,and 300-amu systems with Faraday cup or combination electron multiplier/Faraday cup
- improved hydrogen detection
- superior peak amplitude and position stability
- up to 10 times improvement in signal to noise ratio compared to original Transpector
- faster scanning over low-level signals
- nine-decade electronic dynamic range
- software options for single and multi-chamber systems
- partial pressure measurement from 1 X 10 -4 Torr to 5 X 10 -15 Torr
LIBRARY
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