INFICON Worldwide
Home   |   Product Index   |   Support   |   Library   |   Calendar   |   News

  Semiconductor & Vacuum Coating Process

Customer Support | Technical Info | Calendar | Product News  


> Electron Beam Gun Crucible Indexer
> FabGuard Suite
> In Situ Particle Detectors
> Integrated Process Monitoring
> Leak Detectors
> Quartz Monitor Crystals
> RF Sensing Technology with FabGuard
>Residual Gas Analyzers
> Thin Film Deposition Controllers/QCM
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems

IPC400 Pumping Packages


Design an Easy-To-Use Pumping Package that Extends Your Sampling Range.

INFICON IPC400 pumping packages extend the sampling range of Transpector Gas Analysis Systems. These dry pumping packages are small, lightweight and portable. Combined with any standard open ion source INFICON Transpector, they can sample any process from two atmospheres to high vacuum.

IPC400 Features at a Glance:
  • simple operation - single Start/Stop button.
  • flexible - non-corrosive pumping packages, several inlets, and can be used with any open ion source RGA.
  • small and simple design - fits on various tools or vacuum systems and can be quickly installed by the customer.
  • manual or remote control - IPC400 controller allows for manual or remote operation as well as interlocking the system.
  • mobile - fits on a cleanroom compatible cart for easy movement between systems.

ASSOCIATED TECHNICAL INFORMATION:

 Brochure - IPC400 Pumping Package
 Heating Jackets Can Improve RGA Performance
 Technical Note - IPC400 Pumping Package
 Technical Note - Mobile Cart for IPC400 Systems

I'd like someone to call me to discuss my application.