Comprehensive Gas Analysis Made Affordable INFICON Transpector® CPM provides in situ early warnings and lowers costs by:
measuring gas phase reactions
verifying vacuum integrity
identifying trace-level contaminants
measuring process and background composition
qualifying gas purity
The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.
CPM Features at a Glance:
quadrupole-based gas analysis system for monitoring complex processes.
allows 24/7 monitoring to maximize yield and throughput, thereby minimizing costs.
compact and affordable enough to be installed on every high-pressure vacuum chamber.
HexBlock™ sampling system maximizes performance.
built-in CDG for process pressure monitoring and vacuum interlock.
optional calibration reference available for tuning and gas reference.
long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
lightweight and easily transportable.
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ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
Brochure - Transpector CPM Compact Process Monitor English
Technical Information:
Application Note - Transpector CPM - Integrated Process Monitor for 300mm High Pressure Degas English
Technical Note - Choosing the Appropriate RGA English
Technical Note - Etch Process Monitoring with the Transpector Residual Gas Analyzer English
Technical Note - Gas Purge and CPM Sensor Lifetime English
Technical Note - Heating Jackets Can Improve RGA Performance English
Technical Note - The Optimization of Electron Energy for RGAs English
Technical Note - The Use of Quadrupole Mass Spectrometry to Detect Sub-PPM Level Contaminants in Gas-Phase Samples and Processes English
Technical Note - Transpector CPM Calibration Reference English
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