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Transpector CPM Compact Process Monitor

Comprehensive Gas Analysis Made Affordable
INFICON Transpector® CPM provides in situ early warnings and lowers costs by:
  • measuring gas phase reactions
  • verifying vacuum integrity
  • identifying trace-level contaminants
  • measuring process and background composition
  • qualifying gas purity

The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.

CPM Features at a Glance:
  • quadrupole-based gas analysis system for monitoring complex processes.
  • allows 24/7 monitoring to maximize yield and throughput, thereby minimizing costs.
  • compact and affordable enough to be installed on every high-pressure vacuum chamber.
  • HexBlock™ sampling system maximizes performance.
  • built-in CDG for process pressure monitoring and vacuum interlock.
  • optional calibration reference available for tuning and gas reference.
  • long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
  • lightweight and easily transportable.

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Brochure - Transpector CPM Compact Process Monitor
English

Technical Information:

   Application Note - Transpector CPM - Integrated Process Monitor for 300mm High Pressure Degas
English

   Technical Note - Choosing the Appropriate RGA
English

   Technical Note - Etch Process Monitoring with the Transpector Residual Gas Analyzer
English

   Technical Note - Gas Purge and CPM Sensor Lifetime
English

   Technical Note - Heating Jackets Can Improve RGA Performance
English

   Technical Note - The Optimization of Electron Energy for RGAs
English

   Technical Note - The Use of Quadrupole Mass Spectrometry to Detect Sub-PPM Level Contaminants in Gas-Phase Samples and Processes
English

   Technical Note - Transpector CPM Calibration Reference
English

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