• 100-amu、200-amu 和 300-amu 系统配备有法拉第杯或组合式电子倍增器/法拉第杯
• 提高氢气检测水平
• 优异的峰值振幅和位置稳定性
• 与原始 Transpector 相比，信噪比高达 10 倍

• 九个数量级的电子动态量程
• 针对单腔室系统和多腔室系统的软件选项
• 从 1 X 10 ^-4 Torr 到 5 X 10 ^-15 Torr 范围内的分压力测量

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相关技术资料

产品样本和数据表:

Brochure - Transpector 2 Gas Analysis System English

技术资料:

Technical Note - Benefits of RGA Degassing English

Technical Note - Calculating Partial Pressures English

Technical Note - Calculating Sensitivity for RGA Partial Pressures English

Technical Note - Choosing the Appropriate RGA English

Technical Note - Heating Jackets Can Improve RGA Performance English

Technical Note - Interpretation Guide - General RGA Spectrum English

Technical Note - New Digital Input/Output Board for Transpector Gas Analysis System Using TWare 32 English

Technical Note - Partial Pressures vs. Total Pressure for an Open Ion Source RGA English

Technical Note - Residual Gas Analyzers for Contamination Checking English

Technical Note - Residual Gas Analyzers for Leak Detection English

Technical Note - The Advantages of an RGA with Analog Outputs English

Technical Note - The Practical use of Residual Gas Analysis in a Semiconductor Thermal Processing Module English

Technical Note - Transpector 2 Improvements Lead to Better Process Monitoring English

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