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Transpector 2 气体分析系统
高灵敏性改善污染控制
Transpector® 气体分析系统是一种 RGA，可在半导体制造业中，为真空过程监控、过程诊断和泄漏检测提供精确而可靠的数据。 与之相比，Transpector 2 提高了氢气灵敏度，使下限达 ppm 量级的污染均可一览无余，低电平信号下的扫描速度快达四倍，动态扫描范围更为宽泛，可在更低的可检分压强下提供更纯净的数据。

功能概览
  • 100-amu、200-amu 和 300-amu 系统配备有法拉第杯或组合式电子倍增器/法拉第杯
  • 提高氢气检测水平
  • 优异的峰值振幅和位置稳定性
  • 与原始 Transpector 相比，信噪比高达 10 倍
*低电平信号下扫描速度更快
  • 九个数量级的电子动态量程
  • 针对单腔室系统和多腔室系统的软件选项
  • 从 1 X 10 -4 Torr 到 5 X 10 -15 Torr 范围内的分压力测量

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Brochure - Transpector 2 Gas Analysis System
English

Technical Information:

   Technical Note - Benefits of RGA Degassing
English

   Technical Note - Calculating Partial Pressures
English

   Technical Note - Calculating Sensitivity for RGA Partial Pressures
English

   Technical Note - Choosing the Appropriate RGA
English

   Technical Note - Heating Jackets Can Improve RGA Performance
English

   Technical Note - Interpretation Guide - General RGA Spectrum
English

   Technical Note - New Digital Input/Output Board for Transpector Gas Analysis System Using TWare 32
English

   Technical Note - Partial Pressures vs. Total Pressure for an Open Ion Source RGA
English

   Technical Note - Residual Gas Analyzers for Contamination Checking
English

   Technical Note - Residual Gas Analyzers for Leak Detection
English

   Technical Note - The Advantages of an RGA with Analog Outputs
English

   Technical Note - The Practical use of Residual Gas Analysis in a Semiconductor Thermal Processing Module
English

   Technical Note - Transpector 2 Improvements Lead to Better Process Monitoring
English

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