• 测量气相反应
• 验证真空完整性
• 鉴定痕迹量级污染物
• 测量过程和本底成分
• 检测气体纯度

• 基于四极的气体分析系统可监控复杂的过程。
• 支持 24/7 全天候监控，可最大限度地提高产量和吞吐量，从而大幅降低成本。
• 小巧灵活、经济实惠，适合安装到任何高压真空室。
• HexBlock™ 采样系统提高性能。
• 内置 CDG，支持过程压力监控和真空联锁。
• 可选校准基准（用于调节）和气体基准。
• 长寿命封闭式离子源可检测亚 ppm 量级的污染，同时耐最强的腐蚀性和活性气体。
• 轻便，易携带。

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Brochure - Transpector CPM Compact Process Monitor English

Technical Information:

Application Note - Transpector CPM - Integrated Process Monitor for 300mm High Pressure Degas English

Technical Note - Choosing the Appropriate RGA English

Technical Note - Etch Process Monitoring with the Transpector Residual Gas Analyzer English

Technical Note - Gas Purge and CPM Sensor Lifetime English

Technical Note - Heating Jackets Can Improve RGA Performance English

Technical Note - The Optimization of Electron Energy for RGAs English

Technical Note - The Use of Quadrupole Mass Spectrometry to Detect Sub-PPM Level Contaminants in Gas-Phase Samples and Processes English

Technical Note - Transpector CPM Calibration Reference English

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